Specification |
Properties |
Value |
Material |
Single Crystal Silicon
Multi Crystal Silicon
|
Out diameter |
500mm ~ 240mm |
Resistivity(Ω.㎝) |
Low Res. (< 0.02)
Middle Res. (1~4)
|
RRG(%) |
< 5% |
Surface condition |
Polishing, Lapping, Grinding |
Surface Flatness |
< 5㎛ |
Machining precision |
< 10㎛ |
Quality |
Chipping, Scratch, Crack free
Contamination, Stain free |
|