Product | Description |
---|---|
Silicon Boat | To deposit thin film on wafer during the processes of LPCVD / Deffusion |
Silicon Pedestal | As the base of silicon boat, it blocks the heat & light to maintain constant temperature |
450mm Single Silicon Wafer | 450mm silicon mechanical wafer |
Silicon Boat / Silicon Pedestal | 450mm Single Silicon Wafer |
---|---|
LPCVD / Diffusion for semiconductor process | Semiconductor IC (Integrated Circuit) Chip |
Properties | Silicon Boat / Pedestal |
---|---|
Material | Single crystal silicon |
Wafer Charging | 117EA |
Deposition Uniformity | < 2% |
Machining Precision | < 10㎛ |
Properties | 450mm Single Silicon Wafer |
---|---|
Material | Single crystal silicon |
Type | P Type (Boron dipant) |
Resistivity (Ω.㎝) | Middle Res. (1~4) |
Our Diameter | 450mm |
Thickness | 0.925mm |
Surface Condition | Front - Polishing Back - Polishing |
Notch Dimension | Depth - 1mm Angle - 90° |
Roughness | Ra < 0.02㎛ |
Total Thickness Variation (TTV) | < 10㎛ |