Description

Product	Description
Silicon Boat	To deposit thin film on wafer during the processes of LPCVD / Deffusion
Silicon Pedestal	As the base of silicon boat, it blocks the heat & light to maintain constant temperature
450mm Single Silicon Wafer	450mm silicon mechanical wafer

Applications

Silicon Boat / Silicon Pedestal	450mm Single Silicon Wafer
LPCVD / Diffusion for semiconductor process	Semiconductor IC (Integrated Circuit) Chip

Specification

Properties	Silicon Boat / Pedestal
Material	Single crystal silicon
Wafer Charging	117EA
Deposition Uniformity	< 2%
Machining Precision	< 10㎛

Properties	450mm Single Silicon Wafer
Material	Single crystal silicon
Type	P Type (Boron dipant)
Resistivity (Ω.㎝)	Middle Res. (1~4)
Our Diameter	450mm
Thickness	0.925mm
Surface Condition	Front - Polishing Back - Polishing
Notch Dimension	Depth - 1mm Angle - 90°
Roughness	Ra < 0.02㎛
Total Thickness Variation (TTV)	< 10㎛