Fine Ceramics|Al2O3

Fine Ceramics

Fine Ceramics

Alumina

ProductFine CeramicsAlumina

Aluminum Oxide
Description
  • High pure Al2O3 normally has above 99.5% of purity and include fine grains (~< 1um) above 80%.
  • High pure Al2O3 has high mechanical hardness, wear resistance, thermal resistance, and insulation properties.
Applications
  • Dry etcher and CVD for semiconductor process
Specification
Properties Value
Density (g/cm³) 3.9
Flexural strength (MPa) 370
Vickers hardness (GPa) 17.2
Thermal Conductivity (W/mK, @20℃) 30
Dielectric Strength (V/m) 15 X 106