Description |
- High pure Al2O3 normally has above 99.5% of purity and include fine grains (~< 1um) above 80%.
-
High pure Al2O3 has high mechanical hardness, wear resistance, thermal resistance, and insulation properties.
|
Applications |
- Dry etcher and CVD for semiconductor process
|
Specification |
Properties |
Value |
Density (g/cm³) |
3.9
|
Flexural strength (MPa) |
370 |
Vickers hardness (GPa) |
17.2
|
Thermal Conductivity (W/mK, @20℃) |
30 |
Dielectric Strength (V/m) |
15 X 106 |
|