하나 머티리얼즈의 실리콘 제품을 소개합니다.
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Silicon Other Parts
Description
Product |
Description |
Silicon Boat |
To deposit thin film on wafer during the processes of LPCVD / Deffusion |
Silicon Pedestal |
As the base of silicon boat, it blocks the heat & light to maintain constant
temperature
|
450mm Single Silicon Wafer |
450mm silicon mechanical wafer |
Applications
Silicon Boat / Silicon Pedestal |
450mm Single Silicon Wafer |
LPCVD / Diffusion for semiconductor process
|
Semiconductor IC (Integrated Circuit) Chip
|
Specification
Properties |
Silicon Boat / Pedestal |
Material |
Single crystal silicon |
Wafer Charging |
117EA |
Deposition Uniformity |
< 2% |
Machining Precision |
< 10㎛ |
Properties |
450mm Single Silicon Wafer |
Material |
Single crystal silicon |
Type |
P Type (Boron dipant) |
Resistivity (Ω.㎝) |
Middle Res. (1~4) |
Our Diameter |
450mm |
Thickness |
0.925mm |
Surface Condition |
Front - Polishing Back - Polishing |
Notch Dimension |
Depth - 1mm Angle - 90° |
Roughness |
Ra < 0.02㎛ |
Total Thickness Variation (TTV) |
< 10㎛ |