Silicon
Silicon
Other Parts
제품정보SiliconOther Parts
하나 머티리얼즈의 실리콘 제품을 소개합니다.
기술과 미래가 성장하는 하나 머티리얼즈
실리콘 분야의 고객가치 경영을 추구해나가겠습니다.
실리콘 분야의 고객가치 경영을 추구해나가겠습니다.
Silicon Other Parts
Description
| Product | Description |
|---|---|
| Silicon Boat | To deposit thin film on wafer during the processes of LPCVD / Deffusion |
| Silicon Pedestal | As the base of silicon boat, it blocks the heat & light to maintain constant temperature |
| 450mm Single Silicon Wafer | 450mm silicon mechanical wafer |
Applications
| Silicon Boat / Silicon Pedestal | 450mm Single Silicon Wafer |
|---|---|
| LPCVD / Diffusion for semiconductor process | Semiconductor IC (Integrated Circuit) Chip |
Specification
| Properties | Silicon Boat / Pedestal |
|---|---|
| Material | Single crystal silicon |
| Wafer Charging | 117EA |
| Deposition Uniformity | < 2% |
| Machining Precision | < 10㎛ |
| Properties | 450mm Single Silicon Wafer |
|---|---|
| Material | Single crystal silicon |
| Type | P Type (Boron dipant) |
| Resistivity (Ω.㎝) | Middle Res. (1~4) |
| Our Diameter | 450mm |
| Thickness | 0.925mm |
| Surface Condition | Front - Polishing Back - Polishing |
| Notch Dimension | Depth - 1mm Angle - 90° |
| Roughness | Ra < 0.02㎛ |
| Total Thickness Variation (TTV) | < 10㎛ |